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RAD-2020F/12

RAD-2020F/12

Fully-Automatic UV-LED Irradiation System. With a selectable light source & reduced energy consumption.

 
Selectable UV-light source
RAD-2020F/12 can either be equipped with a high-pressure mercury lamp or a UV-LED system. Note: the high-pressure mercury lamp machine version can be retrofitted with a UV-LED system later on.

Improvement of UPH (+20%)
UPH improvement of 20% compared to LINTEC’s predecessor model by using electrified drive-shafts, as well as an optimized design-concept & process flow.

Maximum UPH: 110 wafers / h (300mm wafer, UV irradiation speed 90mm/sec.).

Reduced footprint
1,590mm (W) x 1,200mm (D) x 1,800mm (H)

Reduced energy consumption
Reduction of energy consumption by up to 95% with UV-LED and by up to 38% with high pressure mercury lamp.

Options
  • Workpiece temperature measurement after UV irradiation
  • Automatic temperature-control system in the lamp house for the high-pressure mercury lamp machine version
  • Double cassette loader or double load-port
  • OHT capability
  • High-class ESD countermeasure specification: ±50V or less immediately after the end of operation (Reference value, measured on mirror wafer)

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