RAD-2010F/12

Fully-Automatic UV Irradiation System. 

 
High precision irradiation with constant illuminance
LINTEC’s fully-automatic UV irradiation system offers highly precise and reliable UV-irradiation of 12 and 8 inch wafers through optimized illuminance and UV-light intensity. Despite its compact design, high volume throughput is enabled by use of two handling lines inside the equipment.

Uniform irradiation of entire surface and automatic illuminance-control
Uniform irradiation of the entire surface is assured through utilization of a nitrogen-filled / oxygen-absent chamber. UV irradiation speed can be set individually and in accordance with requirements of the applied UV-sensitive tape. A built-in sensor enables feedback-control to achieve and maintain constant and uniform UV-lighting output throughout the lamp’s service life.

Smooth and safe operation
Our equipment’s central-loading approach greatly facilitates handling and processstability, while significantly stepping up operational efficiency. A large touch panel improves operability and ensures safety during operations and maintenance. RAD-2010F/12 is capable to realize full factory automation by integrating host communication and inline system functions.

Options
  • Host communication function (communication format: conforms to SECS-I and HSMS/Software: conforms to GEM)
  • Barcode reader for selecting recipes
  • Barcode reader for reading ring frame ID
  • Double loader/unloader